產(chǎn)品用途:
用來生產(chǎn)半導(dǎo)體離子注入零件。
Application:
They are used to produce parts of the semiconductor ion implanter.
產(chǎn)品性能參數(shù)/Product Property Parameters:
產(chǎn)品名稱Name
|
W
|
Mo
|
TZM
|
密度Density
(g/cm3)
|
19.1
|
10.15
|
10.05
|
產(chǎn)品加工精度參數(shù)/Product Processing Accuracy Parameters:
主要材質(zhì)
Main Materials
|
加工范圍
Processing
Range
|
尺寸精度Dimensional Accuracy (mm)
|
形狀精度Shape Accuracy (mm)
|
位置精度Position Accuracy (mm)
|
光潔度Finish
(Ra, μm)
|
W、M、TZM
|
0.00-5.00
|
±0.003
|
0.01
|
0.005
|
0.2-0.4
|
W、M、TZM
|
5.01-15.00
|
±0.005
|
0.015
|
0.006
|
0.4
|
W、M、TZM
|
15.01-30
|
±0.008
|
0.02
|
0.007
|
0.4
|
W、M、TZM
|
30.01-100
|
±0.010
|
0.025
|
0.008
|
0.6
|
W、M、TZM
|
> 100
|
±0.0127
|
0.030
|
0.010
|
0.6
|